11/1/2012	10:10:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2012	10:10:39 AM	Recipe started at 10:10 AM
11/1/2012	10:10:39 AM	Helium valve closed
11/1/2012	10:10:39 AM	H2 valve closed
11/1/2012	10:10:39 AM	BCl3 valve closed
11/1/2012	10:10:39 AM	PH3 valve closed
11/1/2012	10:10:39 AM	SiCl4 pre valve closed
11/1/2012	10:10:39 AM	SiCl4 post valve closed
11/1/2012	10:10:39 AM	Main Vac valve closed
11/1/2012	10:10:39 AM	Bypass valve closed
11/1/2012	10:10:39 AM	Bubbler valve closed
11/1/2012	10:10:39 AM	Helium MFC set to  0.000000
11/1/2012	10:10:39 AM	H2 MFC set to  0.000000
11/1/2012	10:10:39 AM	BCl3 MFC set to  0.000000
11/1/2012	10:10:39 AM	PH3 MFC set to  0.000000
11/1/2012	10:10:39 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:10:39 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:10:39 AM	Tube furnace set to 0
11/1/2012	10:10:42 AM	H2 valve closed
11/1/2012	10:10:42 AM	BCl3 valve closed
11/1/2012	10:10:42 AM	PH3 valve closed
11/1/2012	10:10:42 AM	SiCl4 pre valve closed
11/1/2012	10:10:42 AM	SiCl4 post valve closed
11/1/2012	10:10:42 AM	Main Vac valve closed
11/1/2012	10:10:42 AM	Bypass valve closed
11/1/2012	10:10:42 AM	Bubbler valve closed
11/1/2012	10:10:42 AM	Helium valve opened
11/1/2012	10:10:42 AM	Helium MFC set to  500.000000
11/1/2012	10:10:42 AM	H2 MFC set to  0.000000
11/1/2012	10:10:42 AM	BCl3 MFC set to  0.000000
11/1/2012	10:10:42 AM	PH3 MFC set to  0.000000
11/1/2012	10:10:42 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:10:42 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:10:42 AM	Tube furnace set to 0
11/1/2012	10:11:56 AM	Helium valve closed
11/1/2012	10:11:56 AM	H2 valve closed
11/1/2012	10:11:56 AM	BCl3 valve closed
11/1/2012	10:11:56 AM	PH3 valve closed
11/1/2012	10:11:56 AM	SiCl4 pre valve closed
11/1/2012	10:11:56 AM	SiCl4 post valve closed
11/1/2012	10:11:56 AM	Main Vac valve closed
11/1/2012	10:11:56 AM	Bypass valve closed
11/1/2012	10:11:56 AM	Bubbler valve closed
11/1/2012	10:11:56 AM	Helium MFC set to  0.000000
11/1/2012	10:11:56 AM	H2 MFC set to  0.000000
11/1/2012	10:11:56 AM	BCl3 MFC set to  0.000000
11/1/2012	10:11:56 AM	PH3 MFC set to  0.000000
11/1/2012	10:11:56 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:11:56 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:11:56 AM	Tube furnace set to 0
11/1/2012	10:11:57 AM	Run finished at 10:11 AM
11/1/2012	10:11:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2012	10:14:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2012	10:14:21 AM	Recipe started at 10:14 AM
11/1/2012	10:14:21 AM	Helium valve closed
11/1/2012	10:14:21 AM	H2 valve closed
11/1/2012	10:14:21 AM	BCl3 valve closed
11/1/2012	10:14:21 AM	PH3 valve closed
11/1/2012	10:14:21 AM	SiCl4 pre valve closed
11/1/2012	10:14:21 AM	SiCl4 post valve closed
11/1/2012	10:14:21 AM	Main Vac valve closed
11/1/2012	10:14:21 AM	Bubbler valve closed
11/1/2012	10:14:21 AM	Bypass valve opened
11/1/2012	10:14:21 AM	Helium MFC set to  0.000000
11/1/2012	10:14:21 AM	H2 MFC set to  0.000000
11/1/2012	10:14:21 AM	BCl3 MFC set to  0.000000
11/1/2012	10:14:21 AM	PH3 MFC set to  0.000000
11/1/2012	10:14:21 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:14:21 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:14:21 AM	Tube furnace set to 0
11/1/2012	10:15:35 AM	Helium valve closed
11/1/2012	10:15:35 AM	H2 valve closed
11/1/2012	10:15:35 AM	BCl3 valve closed
11/1/2012	10:15:35 AM	PH3 valve closed
11/1/2012	10:15:35 AM	SiCl4 pre valve closed
11/1/2012	10:15:35 AM	SiCl4 post valve closed
11/1/2012	10:15:35 AM	Main Vac valve closed
11/1/2012	10:15:35 AM	Bubbler valve closed
11/1/2012	10:15:35 AM	Bypass valve opened
11/1/2012	10:15:35 AM	Helium MFC set to  0.000000
11/1/2012	10:15:35 AM	H2 MFC set to  0.000000
11/1/2012	10:15:35 AM	BCl3 MFC set to  0.000000
11/1/2012	10:15:35 AM	PH3 MFC set to  0.000000
11/1/2012	10:15:35 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:15:35 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:15:35 AM	Tube furnace set to 0
11/1/2012	10:16:35 AM	Helium valve closed
11/1/2012	10:16:35 AM	H2 valve closed
11/1/2012	10:16:35 AM	BCl3 valve closed
11/1/2012	10:16:35 AM	PH3 valve closed
11/1/2012	10:16:35 AM	SiCl4 pre valve closed
11/1/2012	10:16:35 AM	SiCl4 post valve closed
11/1/2012	10:16:35 AM	Bypass valve closed
11/1/2012	10:16:35 AM	Bubbler valve closed
11/1/2012	10:16:35 AM	Main Vac valve opened
11/1/2012	10:16:35 AM	Helium MFC set to  0.000000
11/1/2012	10:16:35 AM	H2 MFC set to  0.000000
11/1/2012	10:16:35 AM	BCl3 MFC set to  0.000000
11/1/2012	10:16:35 AM	PH3 MFC set to  0.000000
11/1/2012	10:16:35 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:16:35 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:16:35 AM	Tube furnace set to 0
11/1/2012	10:16:36 AM	Run finished at 10:16 AM
11/1/2012	10:16:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2012	10:32:07 AM	Helium MFC set to  20.000000
11/1/2012	10:32:09 AM	Helium valve opened
11/1/2012	10:32:35 AM	Helium valve closed
11/1/2012	10:32:37 AM	Helium MFC set to  0.000000
11/1/2012	10:33:23 AM	Helium valve opened
11/1/2012	10:33:26 AM	Helium MFC set to  20.000000
11/1/2012	10:34:21 AM	Helium valve closed
11/1/2012	10:34:23 AM	Helium MFC set to  0.000000
11/1/2012	10:37:35 AM	Helium MFC set to  20.000000
11/1/2012	10:37:36 AM	Helium valve opened
11/1/2012	10:38:07 AM	Helium MFC set to  0.000000
11/1/2012	10:38:09 AM	Helium valve closed
11/1/2012	10:39:10 AM	Helium MFC set to  0.000000
11/1/2012	10:39:13 AM	Helium MFC set to  20.000000
11/1/2012	10:39:15 AM	Helium valve opened
11/1/2012	10:39:51 AM	Helium valve closed
11/1/2012	10:39:54 AM	Helium MFC set to  0.000000
11/1/2012	10:40:27 AM	Tube furnace set to 100
11/1/2012	10:41:15 AM	Helium valve opened
11/1/2012	10:41:18 AM	Helium MFC set to  20.000000
11/1/2012	10:41:37 AM	Helium valve closed
11/1/2012	10:41:40 AM	Helium MFC set to  0.000000
11/1/2012	10:42:33 AM	Helium MFC set to  20.000000
11/1/2012	10:42:34 AM	Helium valve opened
11/1/2012	10:43:05 AM	Helium valve closed
11/1/2012	10:43:08 AM	Helium MFC set to  0.000000
11/1/2012	10:44:02 AM	Main Vac valve closed
11/1/2012	10:44:13 AM	Main Vac valve opened
11/1/2012	10:44:45 AM	Helium valve opened
11/1/2012	10:44:50 AM	Helium MFC set to  20.000000
11/1/2012	10:45:22 AM	Helium MFC set to  0.000000
11/1/2012	10:45:23 AM	Helium valve closed
11/1/2012	10:45:52 AM	Helium MFC set to  30.000000
11/1/2012	10:45:53 AM	Helium valve opened
11/1/2012	10:46:03 AM	Helium valve closed
11/1/2012	10:46:05 AM	Helium MFC set to  0.000000
11/1/2012	10:47:41 AM	Helium MFC set to  20.000000
11/1/2012	10:47:42 AM	Helium valve opened
11/1/2012	10:47:55 AM	Helium valve closed
11/1/2012	10:47:57 AM	Helium MFC set to  0.000000
11/1/2012	10:49:33 AM	Helium MFC set to  20.000000
11/1/2012	10:49:35 AM	Helium valve opened
11/1/2012	10:49:53 AM	Helium valve closed
11/1/2012	10:49:55 AM	Helium MFC set to  0.000000
11/1/2012	10:50:53 AM	Recipe started at 10:50 AM
11/1/2012	10:50:53 AM	Helium valve closed
11/1/2012	10:50:53 AM	H2 valve closed
11/1/2012	10:50:53 AM	BCl3 valve closed
11/1/2012	10:50:53 AM	PH3 valve closed
11/1/2012	10:50:53 AM	SiCl4 pre valve closed
11/1/2012	10:50:53 AM	SiCl4 post valve closed
11/1/2012	10:50:53 AM	Main Vac valve closed
11/1/2012	10:50:53 AM	Bypass valve closed
11/1/2012	10:50:53 AM	Bubbler valve closed
11/1/2012	10:50:53 AM	Helium MFC set to  0.000000
11/1/2012	10:50:53 AM	H2 MFC set to  0.000000
11/1/2012	10:50:53 AM	BCl3 MFC set to  0.000000
11/1/2012	10:50:53 AM	PH3 MFC set to  0.000000
11/1/2012	10:50:53 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:50:53 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:50:53 AM	Tube furnace set to 0
11/1/2012	10:50:56 AM	Helium valve closed
11/1/2012	10:50:56 AM	BCl3 valve closed
11/1/2012	10:50:56 AM	PH3 valve closed
11/1/2012	10:50:56 AM	SiCl4 pre valve closed
11/1/2012	10:50:56 AM	SiCl4 post valve closed
11/1/2012	10:50:56 AM	Main Vac valve closed
11/1/2012	10:50:56 AM	Bypass valve closed
11/1/2012	10:50:56 AM	Bubbler valve closed
11/1/2012	10:50:56 AM	H2 valve opened
11/1/2012	10:50:56 AM	Helium MFC set to  0.000000
11/1/2012	10:50:56 AM	H2 MFC set to  500.000000
11/1/2012	10:50:56 AM	BCl3 MFC set to  0.000000
11/1/2012	10:50:56 AM	PH3 MFC set to  0.000000
11/1/2012	10:50:56 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:50:56 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:50:56 AM	Tube furnace set to 0
11/1/2012	10:52:11 AM	Helium valve closed
11/1/2012	10:52:11 AM	BCl3 valve closed
11/1/2012	10:52:11 AM	PH3 valve closed
11/1/2012	10:52:11 AM	SiCl4 pre valve closed
11/1/2012	10:52:11 AM	SiCl4 post valve closed
11/1/2012	10:52:11 AM	Main Vac valve closed
11/1/2012	10:52:11 AM	Bypass valve closed
11/1/2012	10:52:11 AM	H2 valve opened
11/1/2012	10:52:11 AM	Bubbler valve opened
11/1/2012	10:52:11 AM	Helium MFC set to  0.000000
11/1/2012	10:52:11 AM	H2 MFC set to  500.000000
11/1/2012	10:52:11 AM	BCl3 MFC set to  0.000000
11/1/2012	10:52:11 AM	PH3 MFC set to  0.000000
11/1/2012	10:52:11 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:52:11 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:52:11 AM	Tube furnace set to 0
11/1/2012	10:52:12 AM	Helium valve closed
11/1/2012	10:52:12 AM	BCl3 valve closed
11/1/2012	10:52:12 AM	PH3 valve closed
11/1/2012	10:52:12 AM	SiCl4 pre valve closed
11/1/2012	10:52:12 AM	SiCl4 post valve closed
11/1/2012	10:52:12 AM	Main Vac valve closed
11/1/2012	10:52:12 AM	Bypass valve closed
11/1/2012	10:52:12 AM	H2 valve opened
11/1/2012	10:52:12 AM	Bubbler valve opened
11/1/2012	10:52:12 AM	Helium MFC set to  0.000000
11/1/2012	10:52:12 AM	H2 MFC set to  500.000000
11/1/2012	10:52:12 AM	BCl3 MFC set to  0.000000
11/1/2012	10:52:12 AM	PH3 MFC set to  0.000000
11/1/2012	10:52:12 AM	SiCl4 MFC set to  0.000000
11/1/2012	10:52:12 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	10:52:12 AM	Tube furnace set to 1000
11/1/2012	11:12:12 AM	Helium valve closed
11/1/2012	11:12:12 AM	BCl3 valve closed
11/1/2012	11:12:12 AM	Main Vac valve closed
11/1/2012	11:12:12 AM	Bypass valve closed
11/1/2012	11:12:12 AM	H2 valve opened
11/1/2012	11:12:12 AM	PH3 valve opened
11/1/2012	11:12:12 AM	SiCl4 pre valve opened
11/1/2012	11:12:12 AM	SiCl4 post valve opened
11/1/2012	11:12:12 AM	Bubbler valve opened
11/1/2012	11:12:12 AM	Helium MFC set to  0.000000
11/1/2012	11:12:12 AM	H2 MFC set to  450.000000
11/1/2012	11:12:12 AM	BCl3 MFC set to  0.000000
11/1/2012	11:12:12 AM	PH3 MFC set to  0.300000
11/1/2012	11:12:12 AM	SiCl4 MFC set to  50.000000
11/1/2012	11:12:12 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:12:12 AM	Tube furnace set to 1000
11/1/2012	11:26:12 AM	Helium valve closed
11/1/2012	11:26:12 AM	BCl3 valve closed
11/1/2012	11:26:12 AM	PH3 valve closed
11/1/2012	11:26:12 AM	SiCl4 pre valve closed
11/1/2012	11:26:12 AM	SiCl4 post valve closed
11/1/2012	11:26:12 AM	Main Vac valve closed
11/1/2012	11:26:12 AM	Bypass valve closed
11/1/2012	11:26:12 AM	H2 valve opened
11/1/2012	11:26:12 AM	Bubbler valve opened
11/1/2012	11:26:12 AM	Helium MFC set to  0.000000
11/1/2012	11:26:12 AM	H2 MFC set to  500.000000
11/1/2012	11:26:12 AM	BCl3 MFC set to  0.000000
11/1/2012	11:26:12 AM	PH3 MFC set to  0.000000
11/1/2012	11:26:12 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:26:12 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:26:12 AM	Tube furnace set to 950
11/1/2012	11:28:12 AM	Helium valve closed
11/1/2012	11:28:13 AM	BCl3 valve closed
11/1/2012	11:28:13 AM	PH3 valve closed
11/1/2012	11:28:13 AM	SiCl4 pre valve closed
11/1/2012	11:28:13 AM	SiCl4 post valve closed
11/1/2012	11:28:13 AM	Main Vac valve closed
11/1/2012	11:28:13 AM	Bypass valve closed
11/1/2012	11:28:13 AM	H2 valve opened
11/1/2012	11:28:13 AM	Bubbler valve opened
11/1/2012	11:28:13 AM	Helium MFC set to  0.000000
11/1/2012	11:28:13 AM	H2 MFC set to  500.000000
11/1/2012	11:28:13 AM	BCl3 MFC set to  0.000000
11/1/2012	11:28:13 AM	PH3 MFC set to  0.000000
11/1/2012	11:28:13 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:28:13 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:28:13 AM	Tube furnace set to 900
11/1/2012	11:30:13 AM	Helium valve closed
11/1/2012	11:30:13 AM	BCl3 valve closed
11/1/2012	11:30:13 AM	PH3 valve closed
11/1/2012	11:30:13 AM	SiCl4 pre valve closed
11/1/2012	11:30:13 AM	SiCl4 post valve closed
11/1/2012	11:30:13 AM	Main Vac valve closed
11/1/2012	11:30:13 AM	Bypass valve closed
11/1/2012	11:30:13 AM	H2 valve opened
11/1/2012	11:30:13 AM	Bubbler valve opened
11/1/2012	11:30:13 AM	Helium MFC set to  0.000000
11/1/2012	11:30:13 AM	H2 MFC set to  500.000000
11/1/2012	11:30:13 AM	BCl3 MFC set to  0.000000
11/1/2012	11:30:13 AM	PH3 MFC set to  0.000000
11/1/2012	11:30:13 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:30:13 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:30:13 AM	Tube furnace set to 850
11/1/2012	11:32:13 AM	H2 valve closed
11/1/2012	11:32:13 AM	BCl3 valve closed
11/1/2012	11:32:13 AM	PH3 valve closed
11/1/2012	11:32:13 AM	SiCl4 pre valve closed
11/1/2012	11:32:13 AM	SiCl4 post valve closed
11/1/2012	11:32:13 AM	Main Vac valve closed
11/1/2012	11:32:13 AM	Bypass valve closed
11/1/2012	11:32:13 AM	Helium valve opened
11/1/2012	11:32:13 AM	Bubbler valve opened
11/1/2012	11:32:13 AM	Helium MFC set to  500.000000
11/1/2012	11:32:13 AM	H2 MFC set to  0.000000
11/1/2012	11:32:13 AM	BCl3 MFC set to  0.000000
11/1/2012	11:32:13 AM	PH3 MFC set to  0.000000
11/1/2012	11:32:13 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:32:13 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:32:13 AM	Tube furnace set to 800
11/1/2012	11:34:13 AM	H2 valve closed
11/1/2012	11:34:13 AM	BCl3 valve closed
11/1/2012	11:34:13 AM	PH3 valve closed
11/1/2012	11:34:13 AM	SiCl4 pre valve closed
11/1/2012	11:34:13 AM	SiCl4 post valve closed
11/1/2012	11:34:13 AM	Main Vac valve closed
11/1/2012	11:34:13 AM	Bypass valve closed
11/1/2012	11:34:13 AM	Helium valve opened
11/1/2012	11:34:13 AM	Bubbler valve opened
11/1/2012	11:34:13 AM	Helium MFC set to  500.000000
11/1/2012	11:34:13 AM	H2 MFC set to  0.000000
11/1/2012	11:34:13 AM	BCl3 MFC set to  0.000000
11/1/2012	11:34:13 AM	PH3 MFC set to  0.000000
11/1/2012	11:34:13 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:34:13 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:34:13 AM	Tube furnace set to 750
11/1/2012	11:36:13 AM	H2 valve closed
11/1/2012	11:36:13 AM	BCl3 valve closed
11/1/2012	11:36:13 AM	PH3 valve closed
11/1/2012	11:36:13 AM	SiCl4 pre valve closed
11/1/2012	11:36:13 AM	SiCl4 post valve closed
11/1/2012	11:36:13 AM	Main Vac valve closed
11/1/2012	11:36:13 AM	Bypass valve closed
11/1/2012	11:36:13 AM	Helium valve opened
11/1/2012	11:36:13 AM	Bubbler valve opened
11/1/2012	11:36:13 AM	Helium MFC set to  500.000000
11/1/2012	11:36:13 AM	H2 MFC set to  0.000000
11/1/2012	11:36:13 AM	BCl3 MFC set to  0.000000
11/1/2012	11:36:13 AM	PH3 MFC set to  0.000000
11/1/2012	11:36:13 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:36:13 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:36:14 AM	Tube furnace set to 0
11/1/2012	11:56:14 AM	Helium valve closed
11/1/2012	11:56:14 AM	H2 valve closed
11/1/2012	11:56:14 AM	BCl3 valve closed
11/1/2012	11:56:14 AM	PH3 valve closed
11/1/2012	11:56:14 AM	SiCl4 pre valve closed
11/1/2012	11:56:14 AM	SiCl4 post valve closed
11/1/2012	11:56:14 AM	Main Vac valve closed
11/1/2012	11:56:14 AM	Bypass valve closed
11/1/2012	11:56:14 AM	Bubbler valve closed
11/1/2012	11:56:14 AM	Helium MFC set to  0.000000
11/1/2012	11:56:14 AM	H2 MFC set to  0.000000
11/1/2012	11:56:14 AM	BCl3 MFC set to  0.000000
11/1/2012	11:56:14 AM	PH3 MFC set to  0.000000
11/1/2012	11:56:14 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:56:14 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:56:14 AM	Tube furnace set to 0
11/1/2012	11:56:15 AM	Helium valve closed
11/1/2012	11:56:15 AM	H2 valve closed
11/1/2012	11:56:15 AM	BCl3 valve closed
11/1/2012	11:56:15 AM	PH3 valve closed
11/1/2012	11:56:15 AM	SiCl4 pre valve closed
11/1/2012	11:56:15 AM	SiCl4 post valve closed
11/1/2012	11:56:15 AM	Main Vac valve closed
11/1/2012	11:56:15 AM	Bubbler valve closed
11/1/2012	11:56:15 AM	Bypass valve opened
11/1/2012	11:56:15 AM	Helium MFC set to  0.000000
11/1/2012	11:56:15 AM	H2 MFC set to  0.000000
11/1/2012	11:56:15 AM	BCl3 MFC set to  0.000000
11/1/2012	11:56:15 AM	PH3 MFC set to  0.000000
11/1/2012	11:56:15 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:56:15 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:56:15 AM	Tube furnace set to 0
11/1/2012	11:57:17 AM	Helium valve closed
11/1/2012	11:57:17 AM	H2 valve closed
11/1/2012	11:57:17 AM	BCl3 valve closed
11/1/2012	11:57:17 AM	PH3 valve closed
11/1/2012	11:57:17 AM	SiCl4 pre valve closed
11/1/2012	11:57:17 AM	SiCl4 post valve closed
11/1/2012	11:57:17 AM	Main Vac valve closed
11/1/2012	11:57:17 AM	Bubbler valve closed
11/1/2012	11:57:17 AM	Bypass valve opened
11/1/2012	11:57:17 AM	Helium MFC set to  0.000000
11/1/2012	11:57:17 AM	H2 MFC set to  0.000000
11/1/2012	11:57:17 AM	BCl3 MFC set to  0.000000
11/1/2012	11:57:17 AM	PH3 MFC set to  0.000000
11/1/2012	11:57:17 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:57:17 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:57:17 AM	Tube furnace set to 0
11/1/2012	11:58:17 AM	Helium valve closed
11/1/2012	11:58:17 AM	H2 valve closed
11/1/2012	11:58:17 AM	BCl3 valve closed
11/1/2012	11:58:17 AM	PH3 valve closed
11/1/2012	11:58:17 AM	SiCl4 pre valve closed
11/1/2012	11:58:17 AM	SiCl4 post valve closed
11/1/2012	11:58:17 AM	Bypass valve closed
11/1/2012	11:58:17 AM	Bubbler valve closed
11/1/2012	11:58:17 AM	Main Vac valve opened
11/1/2012	11:58:17 AM	Helium MFC set to  0.000000
11/1/2012	11:58:17 AM	H2 MFC set to  0.000000
11/1/2012	11:58:17 AM	BCl3 MFC set to  0.000000
11/1/2012	11:58:17 AM	PH3 MFC set to  0.000000
11/1/2012	11:58:17 AM	SiCl4 MFC set to  0.000000
11/1/2012	11:58:17 AM	Bypass solenoid MFC set to  0.000000
11/1/2012	11:58:17 AM	Tube furnace set to 0
11/1/2012	11:58:18 AM	Run finished at 11:58 AM
11/1/2012	12:14:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2012	12:14:16 PM	Recipe started at 12:14 PM
11/1/2012	12:14:16 PM	Helium valve closed
11/1/2012	12:14:16 PM	H2 valve closed
11/1/2012	12:14:16 PM	BCl3 valve closed
11/1/2012	12:14:16 PM	PH3 valve closed
11/1/2012	12:14:16 PM	SiCl4 pre valve closed
11/1/2012	12:14:16 PM	SiCl4 post valve closed
11/1/2012	12:14:16 PM	Main Vac valve closed
11/1/2012	12:14:17 PM	Bypass valve closed
11/1/2012	12:14:17 PM	Bubbler valve closed
11/1/2012	12:14:17 PM	Helium MFC set to  0.000000
11/1/2012	12:14:17 PM	H2 MFC set to  0.000000
11/1/2012	12:14:17 PM	BCl3 MFC set to  0.000000
11/1/2012	12:14:17 PM	PH3 MFC set to  0.000000
11/1/2012	12:14:17 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:14:17 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:14:17 PM	Tube furnace set to 0
11/1/2012	12:14:20 PM	H2 valve closed
11/1/2012	12:14:20 PM	BCl3 valve closed
11/1/2012	12:14:20 PM	PH3 valve closed
11/1/2012	12:14:20 PM	SiCl4 pre valve closed
11/1/2012	12:14:20 PM	SiCl4 post valve closed
11/1/2012	12:14:20 PM	Main Vac valve closed
11/1/2012	12:14:20 PM	Bypass valve closed
11/1/2012	12:14:20 PM	Bubbler valve closed
11/1/2012	12:14:20 PM	Helium valve opened
11/1/2012	12:14:20 PM	Helium MFC set to  500.000000
11/1/2012	12:14:20 PM	H2 MFC set to  0.000000
11/1/2012	12:14:20 PM	BCl3 MFC set to  0.000000
11/1/2012	12:14:20 PM	PH3 MFC set to  0.000000
11/1/2012	12:14:20 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:14:20 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:14:20 PM	Tube furnace set to 0
11/1/2012	12:15:32 PM	Helium valve closed
11/1/2012	12:15:32 PM	H2 valve closed
11/1/2012	12:15:32 PM	BCl3 valve closed
11/1/2012	12:15:32 PM	PH3 valve closed
11/1/2012	12:15:32 PM	SiCl4 pre valve closed
11/1/2012	12:15:32 PM	SiCl4 post valve closed
11/1/2012	12:15:32 PM	Main Vac valve closed
11/1/2012	12:15:32 PM	Bypass valve closed
11/1/2012	12:15:32 PM	Bubbler valve closed
11/1/2012	12:15:32 PM	Helium MFC set to  0.000000
11/1/2012	12:15:32 PM	H2 MFC set to  0.000000
11/1/2012	12:15:32 PM	BCl3 MFC set to  0.000000
11/1/2012	12:15:32 PM	PH3 MFC set to  0.000000
11/1/2012	12:15:32 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:15:32 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:15:32 PM	Tube furnace set to 0
11/1/2012	12:15:33 PM	Run finished at 12:15 PM
11/1/2012	12:15:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/1/2012	12:20:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2012	12:20:18 PM	Recipe started at 12:20 PM
11/1/2012	12:20:18 PM	Helium valve closed
11/1/2012	12:20:18 PM	H2 valve closed
11/1/2012	12:20:18 PM	BCl3 valve closed
11/1/2012	12:20:18 PM	PH3 valve closed
11/1/2012	12:20:18 PM	SiCl4 pre valve closed
11/1/2012	12:20:18 PM	SiCl4 post valve closed
11/1/2012	12:20:18 PM	Main Vac valve closed
11/1/2012	12:20:18 PM	Bubbler valve closed
11/1/2012	12:20:18 PM	Bypass valve opened
11/1/2012	12:20:18 PM	Helium MFC set to  0.000000
11/1/2012	12:20:18 PM	H2 MFC set to  0.000000
11/1/2012	12:20:18 PM	BCl3 MFC set to  0.000000
11/1/2012	12:20:18 PM	PH3 MFC set to  0.000000
11/1/2012	12:20:18 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:20:18 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:20:18 PM	Tube furnace set to 0
11/1/2012	12:22:40 PM	Run aborted at 12:22 PM
11/1/2012	12:22:40 PM	Helium valve closed
11/1/2012	12:22:40 PM	H2 valve closed
11/1/2012	12:22:40 PM	BCl3 valve closed
11/1/2012	12:22:40 PM	PH3 valve closed
11/1/2012	12:22:40 PM	SiCl4 pre valve closed
11/1/2012	12:22:40 PM	SiCl4 post valve closed
11/1/2012	12:22:40 PM	Bypass valve closed
11/1/2012	12:22:40 PM	Main Vac valve closed
11/1/2012	12:22:40 PM	Bubbler valve closed
11/1/2012	12:22:40 PM	Helium MFC set to  0.000000
11/1/2012	12:22:40 PM	H2 MFC set to  0.000000
11/1/2012	12:22:41 PM	BCl3 MFC set to  0.000000
11/1/2012	12:22:41 PM	PH3 MFC set to  0.000000
11/1/2012	12:22:41 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:22:41 PM	Tube furnace set to 0
11/1/2012	12:22:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2012	12:23:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2012	12:23:21 PM	Recipe started at 12:23 PM
11/1/2012	12:23:21 PM	Helium valve closed
11/1/2012	12:23:21 PM	H2 valve closed
11/1/2012	12:23:21 PM	BCl3 valve closed
11/1/2012	12:23:21 PM	PH3 valve closed
11/1/2012	12:23:21 PM	SiCl4 pre valve closed
11/1/2012	12:23:21 PM	SiCl4 post valve closed
11/1/2012	12:23:21 PM	Main Vac valve closed
11/1/2012	12:23:21 PM	Bubbler valve closed
11/1/2012	12:23:21 PM	Bypass valve opened
11/1/2012	12:23:21 PM	Helium MFC set to  0.000000
11/1/2012	12:23:21 PM	H2 MFC set to  0.000000
11/1/2012	12:23:21 PM	BCl3 MFC set to  0.000000
11/1/2012	12:23:21 PM	PH3 MFC set to  0.000000
11/1/2012	12:23:21 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:23:21 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:23:21 PM	Tube furnace set to 0
11/1/2012	12:24:27 PM	Run aborted at 12:24 PM
11/1/2012	12:24:27 PM	Helium valve closed
11/1/2012	12:24:27 PM	H2 valve closed
11/1/2012	12:24:27 PM	BCl3 valve closed
11/1/2012	12:24:27 PM	PH3 valve closed
11/1/2012	12:24:27 PM	SiCl4 pre valve closed
11/1/2012	12:24:27 PM	SiCl4 post valve closed
11/1/2012	12:24:27 PM	Bypass valve closed
11/1/2012	12:24:27 PM	Main Vac valve closed
11/1/2012	12:24:27 PM	Bubbler valve closed
11/1/2012	12:24:27 PM	Helium MFC set to  0.000000
11/1/2012	12:24:27 PM	H2 MFC set to  0.000000
11/1/2012	12:24:27 PM	BCl3 MFC set to  0.000000
11/1/2012	12:24:27 PM	PH3 MFC set to  0.000000
11/1/2012	12:24:27 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:24:28 PM	Tube furnace set to 0
11/1/2012	12:24:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2012	12:26:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/1/2012	12:26:38 PM	Recipe started at 12:26 PM
11/1/2012	12:26:38 PM	Helium valve closed
11/1/2012	12:26:38 PM	H2 valve closed
11/1/2012	12:26:38 PM	BCl3 valve closed
11/1/2012	12:26:38 PM	PH3 valve closed
11/1/2012	12:26:38 PM	SiCl4 pre valve closed
11/1/2012	12:26:38 PM	SiCl4 post valve closed
11/1/2012	12:26:38 PM	Main Vac valve closed
11/1/2012	12:26:38 PM	Bubbler valve closed
11/1/2012	12:26:38 PM	Bypass valve opened
11/1/2012	12:26:38 PM	Helium MFC set to  0.000000
11/1/2012	12:26:38 PM	H2 MFC set to  0.000000
11/1/2012	12:26:38 PM	BCl3 MFC set to  0.000000
11/1/2012	12:26:38 PM	PH3 MFC set to  0.000000
11/1/2012	12:26:38 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:26:38 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:26:39 PM	Tube furnace set to 0
11/1/2012	12:28:44 PM	Helium valve closed
11/1/2012	12:28:44 PM	H2 valve closed
11/1/2012	12:28:44 PM	BCl3 valve closed
11/1/2012	12:28:44 PM	PH3 valve closed
11/1/2012	12:28:44 PM	SiCl4 pre valve closed
11/1/2012	12:28:44 PM	SiCl4 post valve closed
11/1/2012	12:28:44 PM	Main Vac valve closed
11/1/2012	12:28:44 PM	Bubbler valve closed
11/1/2012	12:28:44 PM	Bypass valve opened
11/1/2012	12:28:44 PM	Helium MFC set to  0.000000
11/1/2012	12:28:44 PM	H2 MFC set to  0.000000
11/1/2012	12:28:44 PM	BCl3 MFC set to  0.000000
11/1/2012	12:28:44 PM	PH3 MFC set to  0.000000
11/1/2012	12:28:44 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:28:44 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:28:45 PM	Tube furnace set to 0
11/1/2012	12:29:45 PM	Helium valve closed
11/1/2012	12:29:45 PM	H2 valve closed
11/1/2012	12:29:45 PM	BCl3 valve closed
11/1/2012	12:29:45 PM	PH3 valve closed
11/1/2012	12:29:45 PM	SiCl4 pre valve closed
11/1/2012	12:29:45 PM	SiCl4 post valve closed
11/1/2012	12:29:45 PM	Bypass valve closed
11/1/2012	12:29:45 PM	Bubbler valve closed
11/1/2012	12:29:45 PM	Main Vac valve opened
11/1/2012	12:29:45 PM	Helium MFC set to  0.000000
11/1/2012	12:29:45 PM	H2 MFC set to  0.000000
11/1/2012	12:29:45 PM	BCl3 MFC set to  0.000000
11/1/2012	12:29:45 PM	PH3 MFC set to  0.000000
11/1/2012	12:29:45 PM	SiCl4 MFC set to  0.000000
11/1/2012	12:29:45 PM	Bypass solenoid MFC set to  0.000000
11/1/2012	12:29:45 PM	Tube furnace set to 0
11/1/2012	12:29:46 PM	Run finished at 12:29 PM
11/1/2012	12:29:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
